Application of a Phase-grating Beamsplitter in Laser-Processing Indium-Tin-Oxide Films for Liquid Crystal Panels

Autor: Tomio Sonehara, Jun Amako, Masami Murai
Rok vydání: 1998
Předmět:
Zdroj: Optical Review. 5:83-88
ISSN: 1349-9432
1340-6000
Popis: Array illumination built on a binary phase grating with a green, Q-switched, pulse Nd:YAG laser is used for patterning indium-tin-oxide films into electrodes of liquid crystal display panels. To this end, even-fanout gratings are recursively designed by simulated-annealing algorithm and are realized in quartz glasses by dry etching. While an array of identically intense beam spots strikes the film, a table supporting the film moves in a direction orthogonal to said spots array at a constant speed, forming a large group of equispaced grooves in the film. A machining yield of 1600 mm/s has been attained using a 32×1 grating.
Databáze: OpenAIRE
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