Thermal Stability of alpha-(AlxGa1-x)2O3 Films Grown on C-Plane Sapphire Substrates

Autor:	Riena Jinno, Kentaro Kaneko, Shizuo Fujita
Rok vydání:	2020
Zdroj:	Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0559aef059bc2a5a275a553bca2cf7f5 https://doi.org/10.7567/ssdm.2020.d-9-01 Zobrazit plný text záznamu