| Autor: |
M. Krnac, Miroslav Husak, Š. Haščík, P. Hrkút, Tibor Lalinský, L. Matay, Ivan Kostic, Jiri Jakovenko, Ž. Mozolová |
| Rok vydání: |
2003 |
| Předmět: |
|
| Zdroj: |
International Journal of Computational Engineering Science. :543-546 |
| ISSN: |
1465-8763 |
| DOI: |
10.1142/s146587630300171x |
| Popis: |
Design technology and characterization of new GaAs island based Micromechanical Thermal Converter (MTC) device are presented. The MTC device introduced consists of pHEMT as a microwave heater and thin film polySi/Ni resistor as a temperature sensor monolithically integrated on polyimide-fixed 1 μm thick GaAs/AlGaAs island structure. The preliminary experimental results in the device electro-thermal conversion evaluation are demonstrated. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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