New statistical optimization method in fabricating 65nm MOSFET transistors using Monte Carlo and Dual Pearson models

Autor: Chu-Yu Chen, Jia-Chun Lin, Meng-Hua Tsa
Rok vydání: 2011
Předmět:
Zdroj: 2011 International Meeting for Future of Electron Devices.
DOI: 10.1109/imfedk.2011.5944840
Popis: In this paper, a new statistical analysis method is presented to investigate the effect of nine factors in the 65nm MOSFET structure. The aim of this work is to clarify the electrical properties, correlation of the principal factors, based on exploratory factor analysis (EFA). From the simulation result, optimization parameters are determinative to achieve the objective.
Databáze: OpenAIRE