Failure analysis on the standby current due to dislocation in STI structure of flash memory

Autor: Hansoo Kim, Hyung Mo Yang, Ji Woong Sue, Seok Sik Kim, Juhyeon Ahn, Ji Woon Rim, Ki Hyun Hwang, Sang In Kim, Hee Seong Yang, Yu Gyun Shin, Sun Kyu Whang, Woon Kyung Lee, Han Ku Cho
Rok vydání: 2012
Předmět:
Zdroj: 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits.
DOI: 10.1109/ipfa.2012.6306313
Popis: The technology of increasing Internal Vcc without using memory tester is used to enhance the photon emission and the failure range is defined in detail by nano probing. With these methods, we found out that the leakage current was caused by dislocations of STI arranged in a row.
Databáze: OpenAIRE