| Autor: |
Stefan McMurtry, E. Blampain, C. Fu, François Montaigne, S. S. Yang, Omar Elmazria, K. K. Lee, Ouarda Legrani |
| Rok vydání: |
2013 |
| Předmět: |
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| Zdroj: |
2013 IEEE International Ultrasonics Symposium (IUS). |
| DOI: |
10.1109/ultsym.2013.0277 |
| Popis: |
In this work, Pt/AlN/Sapphire SAW resonator operating in 2.45GHz ISM band is studied as a potential sensor for high temperature and high frequency applications. Experimental characterization was realized using a specific station probe between room temperature and 500°C. Results show that electromechanical factor of the structure (K2) increase with temperature, while the quality factor decreases. The variation of frequency with temperature shows a good linearity, which is very useful for temperature sensor applications and the measured TCF of -35 ppm/°C is consisting with modeling predictions. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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