Investigation of LiNbO3 thin films grown on Si substrate using magnetron sputter

Autor:	Fu Tsai Hwang, Ching-Ting Lee, Hsin Ying Lee, Tsung Hsin Lee
Rok vydání:	2007
Předmět:	Materials science Mechanical Engineering Lithium niobate Analytical chemistry Substrate (electronics) Condensed Matter Physics Crystallinity chemistry.chemical_compound chemistry Mechanics of Materials Sputtering Ellipsometry Cavity magnetron General Materials Science Thin film Diffractometer
Zdroj:	Materials Science and Engineering: B. 136:92-95
ISSN:	0921-5107
DOI:	10.1016/j.mseb.2006.09.001
Popis:	A RF magnetron sputter system was used to deposit lithium niobate (LiNbO 3 ) thin films on (1 1 1)-oriented Si substrates. An optimal sputtering condition with RF power of 100 W, Ar/O 2 ratio of 1 and substrate temperature of 575 °C was investigated. The smallest surface roughness of 6.0 nm for the deposited LiNbO 3 was measured using atomic force microscopy. The crystallinity was examined by low angle X-ray diffractometer. Using the SOPRA GES5 spectroscopic ellipsometer, the associated refractive index and extinction coefficient as a function of wavelength were measured. High optical performance with crystallinity structure of the deposited LiNbO 3 thin films was demonstrated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::04bdc05e9f98e6699d5bd171747ee0dc https://doi.org/10.1016/j.mseb.2006.09.001 Zobrazit plný text záznamu Full Text from ScienceDirect