Backside Photoemission and Infrared Microthermography for Rapid Debug of Compound Semiconductor Devices

Autor: Darrell G. Hill, H. Henry, Manoj Nair, Scott Kiefer, S. Mitra, Mariam G. Sadaka, Paul W. Sanders, M. Sutton, Syd R. Wilson, John W. Steele
Rok vydání: 2002
Předmět:
Zdroj: International Symposium for Testing and Failure Analysis.
ISSN: 0890-1740
DOI: 10.31399/asm.cp.istfa2002p0173
Popis: Visible to infra-red photon emissions can be readily observed in compound semiconductor devices through the semi-insullating substrate and are useful in fault identification when analyzing yield problems. The techniques described here have uncovered several yield-limiting mechanisms and have lead to rapid and effective corrective measures.
Databáze: OpenAIRE