| Autor: |
Heng Lu, Ye Tian, Yan Ying, Antoine Reserbat-Plantey, Frank H. L. Koppens, Fanqi Xu, Fengnan Chen, Jun Lu, Kevin G. Schädler, Joel Moser, Ce Zhang, Chinhua Wang, Chen Yang |
| Rok vydání: |
2021 |
| Předmět: |
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| Zdroj: |
Precision Engineering. 72:769-776 |
| ISSN: |
0141-6359 |
| DOI: |
10.1016/j.precisioneng.2021.06.012 |
| Popis: |
Imaging the vibrations of nanomechanical resonators means measuring their flexural mode shapes from the dependence of their frequency response on in-plane position. Applied to two-dimensional resonators, this technique provides a wealth of information on the mechanical properties of atomically-thin membranes. We present a simple and robust system to image the vibrations of few layer graphene (FLG) resonators at room temperature and in vacuum with an in-plane displacement precision of ≈0.20 μm. It consists of a sturdy vacuum enclosure mounted on a three-axis micropositioning stage and designed for free space optical measurements of vibrations. The system is equipped with ultraflexible radio frequency transmission lines to electrically actuate resonators. With it we characterize the lowest frequency mode of FLG resonators by measuring its frequency response as a function of position on the membrane and by extracting its effective mass. We use the background noise of the undriven vibrational spectrum to calibrate in-plane displacement. Finally, we measure the first three vibration modes of a resonator whose membrane is partially folded and find that folds locally suppress vibrations. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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