Electrochemical Palladium Deposition for Reducing Critical Dimensions in Nanostructures
| Autor: | Asli Sahin, John M. Cotte, Qiang Huang, Brett Baker-O'Neal |
|---|---|
| Rok vydání: | 2014 |
| Předmět: |
Materials science
Nanostructure Renewable Energy Sustainability and the Environment Inorganic chemistry chemistry.chemical_element Condensed Matter Physics Electrochemistry Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Chemical engineering Materials Chemistry Deposition (chemistry) Palladium |
| Zdroj: | Journal of The Electrochemical Society. 161:D697-D703 |
| ISSN: | 1945-7111 0013-4651 |
| DOI: | 10.1149/2.0851412jes |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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