An IR and NMR study of the chemisorption of titanium tetrachloride on silica

Autor:	Andrew Root, Eeva Liisa Lakomaa, Suvi Haukka
Rok vydání:	1993
Předmět:	Magic angle Inorganic chemistry General Engineering chemistry.chemical_element Infrared spectroscopy Sulfuric acid chemistry.chemical_compound chemistry Chemisorption Atomic layer epitaxy Titanium tetrachloride Physical and Theoretical Chemistry Fourier transform infrared spectroscopy Titanium
Zdroj:	The Journal of Physical Chemistry. 97:5085-5094
ISSN:	1541-5740 0022-3654
DOI:	10.1021/j100121a040
Popis:	The atomic layer epitaxy (ALE) reactions, i.e., the saturating gas-solid reactions of TiCl 4 at 175 and 450 o C with silica preheated at 200-820 o C, were studied by nuclear magnetic resonance and Fourier transform infrared spectroscopy, while etching experiments with sulfuric acid were carried out to determine the amount of amorphous titanium species. At 175 o C TiCl 4 reacted directly with the OH groups of silica either monofunctionally or bifunctionally depending on the preheat temperature of silica
Databáze:	OpenAIRE
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