| Autor: |
Reza Abdolvand, Ankesh Todi, Sina Moradian, Hakhamanesh Mansoorzare |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
2020 IEEE SENSORS. |
| DOI: |
10.1109/sensors47125.2020.9278836 |
| Popis: |
A novel resonant micro-accelerometer is implemented with an operational frequency of ~27 MHz in which an acceleration-induced change of capacitance is transformed to a frequency shift in a piezoelectric resonator utilizing the piezoelectric stiffening mechanism. In this device the mass-spring system is not embedded within the resonator, enabling a large degree of freedom in choosing the resonance frequency of the resonator. The piezoelectric resonator and the capacitive mass spring (CMS) structure are both fabricated on a silicon-on-insulator (SOI) wafer covered by a thin film of sputtered aluminum nitride. The feasibility and the efficiency of this novel sensing mechanism has been proven by demonstrating a ~600 Hz shift in the resonance frequency as the sample accelerometer was rotated 1800 yielding a 300Hz.g-1 sensitivity. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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