Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers
| Autor: | Caroline Sunyong Lee, Jin-Goo Park, Dong-Chan Kim, Tae-Young Kwon, Hyuk-Min Kim, Hyun-Woo Lim, Ji-Young Roh |
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| Rok vydání: | 2013 |
| Předmět: | |
| Zdroj: | Korean Journal of Metals and Materials. 51:259-264 |
| ISSN: | 2288-8241 1738-8228 |
| DOI: | 10.3365/kjmm.2013.51.4.259 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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