Dynamics of nanosecond laser annealing of silicon
| Autor: | G. D. Ivlev, V. V. Zhidkov, V. L. Malevich, V. A. Pilipovich |
|---|---|
| Rok vydání: | 1985 |
| Předmět: |
Materials science
Condensed matter physics Silicon Physics::Instrumentation and Detectors business.industry Annealing (metallurgy) Mechanical Engineering General Chemical Engineering Mathematics::Analysis of PDEs General Engineering Complex system Stefan problem chemistry.chemical_element Condensed Matter Physics Laser annealing Optics chemistry Mathematics::K-Theory and Homology Mathematics::Category Theory Physics::Atomic Physics Nanosecond laser business |
| Zdroj: | Journal of Engineering Physics. 48:228-233 |
| ISSN: | 1573-871X 0022-0841 |
| DOI: | 10.1007/bf00871878 |
| Popis: | On the basis of a numerical solution of the Stefan problem, the dynamics of nanosecond laser annealing of silicon is investigated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full text from SpringerLink