Improvement in power durability of SAW filters

Autor: Osamu Ikata, Takashi Matsuda, Hidema Uchishiba, Y. Satoh, Tokihiro Nishihara
Rok vydání: 2002
Předmět:
Zdroj: 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium.
DOI: 10.1109/ultsym.1995.495603
Popis: This paper describes the improvement in power durability of SAW filters in terms of filter designs and electrode materials. In this study, we used the previously reported ladder-type filter composed of one-port SAW resonators. For filter design, short aperture length and reduction of resonant resistance improved power durability. We clarified the frequency dependence of chip temperature and lifetime in a ladder-type filter. For electrode materials, Cu sandwiched film has high power durability. This is caused by stone-wall-like structure and alloy formation in intermediate layers. The optimum Cu quantity for multi-layered film was significant for high power durability.
Databáze: OpenAIRE