Optical parameters and energy gap estimation in hafnia thin film

Autor:	S. S. Savchenko, V. A. Gritsenko, A. S. Vokhmintsev, A. O. Shilov, I. A. Weinstein
Rok vydání:	2020
Předmět:	3D optical data storage Materials science biology business.industry Band gap Physics::Optics Molar absorptivity Hafnia biology.organism_classification Condensed Matter::Materials Science Absorption edge Dispersion (optics) Optoelectronics Thin film business Refractive index
Zdroj:	THE 2ND INTERNATIONAL CONFERENCE ON PHYSICAL INSTRUMENTATION AND ADVANCED MATERIALS 2019.
ISSN:	0094-243X
DOI:	10.1063/5.0033176
Popis:	Optical absorption spectra of HfO2 thin film synthesized by ion beam sputtering deposition technique were studied. Interference effects were used to determine film thickness, which was d=288 nm, and to calculate dispersion curves for refractive index, extinction coefficient and both real and imaginary parts of dielectric permittivity. Optical data near intrinsic absorption edge were analyzed to estimate the energy gap of Eg = 5.40±0.05 eV in the hafnia film under research.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::03ac61c87fcc8e2361993077ee28f13a https://doi.org/10.1063/5.0033176 Zobrazit plný text záznamu