Gas discharge etching as a method of investigating polymer structures
| Autor: | L. I. Bezruk |
|---|---|
| Rok vydání: | 1969 |
| Předmět: |
chemistry.chemical_classification
Materials science Structural material Mechanical Engineering Analytical chemistry Polymer Condensed Matter Physics Electric discharge in gases chemistry Chemical engineering Mechanics of Materials Etching (microfabrication) Solid mechanics General Materials Science Reactive-ion etching |
| Zdroj: | Soviet Materials Science. 4:80-81 |
| ISSN: | 1573-885X 0038-5565 |
| DOI: | 10.1007/bf00716340 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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