Autor:	J. D. Oberstar, B.G Streetman
Rok vydání:	1983
Předmět:	Materials science genetic structures Annealing (metallurgy) Doping Materials Chemistry Metals and Alloys sense organs Surfaces and Interfaces Thin film Composite material eye diseases Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Thin Solid Films. 103:17-26
ISSN:	0040-6090
DOI:	10.1016/0040-6090(83)90421-2
Popis:	Methods for protecting GaAs and InP surfaces against degradation during annealing are reviewed. Various thin film encapsulants are discussed, including SiO2, Si3N4 and doped glasses. A discussion of deposition methods and thin film evaluation techniques is presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0387dce8a36316605f2143f5e2a1cb70 https://doi.org/10.1016/0040-6090(83)90421-2 Zobrazit plný text záznamu