Sensitivity analysis of optical scatterometry technique for high-aspect ratio trench measurement
| Autor: | Justine Grasland, Delphine Le Cunff, Hoang Lam Pham, Maxime Besacier, Jean-Hervé Tortai |
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| Rok vydání: | 2023 |
| Zdroj: | Metrology, Inspection, and Process Control XXXVII. |
| Databáze: | OpenAIRE |
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