Prospects for development of the projection X-ray photolithographic technology

Autor:	K. M. Krymskii, M. I. Krymskii, S. M. Aranchii, V. E. Rogalin
Rok vydání:	2015
Předmět:	Radiation Co2 laser Materials science business.industry X-ray Plasma Condensed Matter Physics Polycrystalline diamond Electronic Optical and Magnetic Materials Wavelength Optics Development (differential geometry) Electrical and Electronic Engineering Projection (set theory) business
Zdroj:	Journal of Communications Technology and Electronics. 60:308-310
ISSN:	1555-6557 1064-2269
DOI:	10.1134/s1064226915030031
Popis:	Practical prospects for the implementation of the projection X-ray photolithographic technology in the wavelength interval 3–30 nm based on a combination of the CO2-laser plasma and multilayer X-ray reflectors is analyzed. It is demonstrated that the stable work of the CO2 laser with a power of several tens of kilowatts necessitates the application of a cooled polycrystalline diamond window between the active medium and atmosphere. Practical recommendations for the construction of the high-reflection coatings for the soft X-ray radiation based on the extension of the set of material layers are proposed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::03248d546ab42aa0953ca13c92bc8f0e https://doi.org/10.1134/s1064226915030031 Zobrazit plný text záznamu Full text from SpringerLink