Ablation experiments on polyimide with femtosecond laser pulses

Autor:	Wolfgang Kautek, S. Baudach, Jörn Bonse
Rok vydání:	1999
Předmět:	Materials science business.industry medicine.medical_treatment General Chemistry medicine.disease_cause Ablation Laser Fluence law.invention X-ray laser Optics law Femtosecond medicine Sapphire General Materials Science Photolithography business Ultraviolet
Zdroj:	Applied Physics A: Materials Science & Processing. 69:S395-S398
ISSN:	1432-0630 0947-8396
DOI:	10.1007/s003390051424
Popis:	Some applications of polymer films require the microstructuring of partly uneven substrates. This cannot be achieved by conventional photolithography, usually performed with ultraviolet short-pulse lasers (excimer, fourth harmonic Nd:YAG). When processing thermally sensitive or undoped polymers with low optical absorption, the use of femtosecond laser pulses can improve the ablation precision, also reducing the heat-affected zone. Therefore, a Ti:sapphire laser system was employed to perform ablation experiments on polyimide (PI). The irradiated areas were evaluated by means of optical and scanning electron microscopy. Highly oriented ripple structures, which are related to the polarization state of the laser pulses, were observed in the cavities. The relationship between the ablation threshold fluence and the number of laser pulses applied to the same spot is described in accordance with an incubation model.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::03108bba7e1fe619884bdbc42ab123c2 https://doi.org/10.1007/s003390051424 Zobrazit plný text záznamu Plný text ve formátu PDF