A thin-film bulk-acoustic-wave resonator-controlled oscillator on silicon
| Autor: | G.R. Kline, R.S. Ketcham, Allen R. Landin, W.A. Burkland |
|---|---|
| Rok vydání: | 1987 |
| Předmět: |
Materials science
Silicon business.industry Transistor Electrical engineering dBc chemistry.chemical_element Integrated circuit Fundamental frequency Electronic Optical and Magnetic Materials law.invention Resonator chemistry law Phase noise Optoelectronics Pierce oscillator Electrical and Electronic Engineering business |
| Zdroj: | IEEE Electron Device Letters. 8:531-533 |
| ISSN: | 0741-3106 |
| Popis: | A composite ZnO bulk-acoustic-wave thin-film resonator (TFR) has been fabricated on a silicon substrate with a double-diffused BJT. Fabrication techniques unique to the integration of the TFR are discussed. The integrated TFR-BJT structure was configured as a VHF Pierce oscillator circuit with a fundamental frequency of 257 MHz. Phase noise is better than -90 dBc/Hz at a 1-kHz offset. Temperature stability is - 8.5 ppm/°C from 5°C to 65°C and - 3.75 ppm/°C from 55°C to 5°C. The integration of the TFR with active components is viewed as a development toward large-scale RF circuit integration. |
| Databáze: | OpenAIRE |
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