Study of MEM Relay Contact Design and Body-Bias Effects on on-State Resistance Stability

Autor: Benjamin Osoba, Tsegereda Kedir Esatu, Sergio F. Almeida, Xiaoer Hu, Zhixin Alice Ye, Urmita Sikder, Tiehui Liu
Rok vydání: 2020
Předmět:
Zdroj: Journal of Microelectromechanical Systems. 29:1531-1536
ISSN: 1941-0158
1057-7157
DOI: 10.1109/jmems.2020.3030886
Popis: Body-biased micro-electro-mechanical (MEM) relays previously have been demonstrated to be a promising alternative to transistors for ultra-low voltage digital logic applications. A basic requirement for reliable relay-based circuit operation is suitably low and stable relay ON-state resistance ( $R_{\mathbf {ON}}$ ). In this work, the effect of body biasing on $\text{R}_{\mathbf {ON}}$ is investigated for relays of different contact designs. It is found that a single direct contact design not only provides for the smallest hysteresis voltage but also the smallest $R_{\mathbf {ON}}$ , making it the most suitable for low voltage applications. Body-biased operation is found to degrade $R_{\mathbf {ON}}$ stability over many ON/OFF switching cycles, however, due to a reduction in contact velocity. [2020-0297]
Databáze: OpenAIRE