Gas Sensing Property of Porous SnO2 Layer Synthesized through Anodic Oxidation

Autor:	Hyun Sam Ryu, Seong-Hyeon Hong, Jeong Hoon Jeun
Rok vydání:	2008
Předmět:	chemistry.chemical_compound Crystallinity Aqueous solution Materials science chemistry Chemical engineering Anodizing Rutile Oxalic acid Oxide Wafer Anode
Zdroj:	ECS Transactions. 16:77-81
ISSN:	1938-6737 1938-5862
DOI:	10.1149/1.2982544
Popis:	SnO2 porous structure was fabricated by anodic oxidation. The Sn coated SiO2/Si wafer was used as an anode and it was anodized in 0.3 M oxalic acid aqueous solution using DC power supply. The phase of formed oxide was rutile and the morphology showed a nano porous structure. The porous SnO2 with nano-channel was obtained at 6V in 0.3 M oxalic acid and the pore diameter was approximately 20 nm. A post annealing was performed at 500 ° for 3 h to enhance the crystallinity. To evaluate the gas sensing properties, a comb like Pt pattern was deposited on the anodized and annealed specimen and its gas sensing properties were measured as a function of gas concentration and working temperature
Databáze:	OpenAIRE
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