| Autor: |
Sakisaka Masakatsu, Tomita Michio, Hirabayashi Naoto, Takami Makito, Akatsuka Hiroshi |
| Rok vydání: |
1988 |
| Předmět: |
|
| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 30:207-210 |
| ISSN: |
0168-583X |
| DOI: |
10.1016/0168-583x(88)90119-x |
| Popis: |
A photon counting method has been developed for measuring the current fraction in a D 2 + −He + mixed ion beam. Photons produced by feeding Ar-gas into the beam course are counted through 486 nm- and 389 nm-filters, and the current fraction is instantaneously derived from processing the photon yields with a microcomputer. The sputtering yields of Ta and W obtained by the incidence of pure and mixed ion beams at an energy of 25 keV are demonstrated. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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