Proximity gettering technology for advanced CMOS image sensors using carbon cluster ion‐implantation technique: A review (Phys. Status Solidi A 7∕2017)
| Autor: | Hidehiko Okuda, Satoshi Shigemastu, Ryo Hirose, Ayumi Onaka-Masada, Takeshi Kadono, Ryousuke Okuyama, Yoshihiro Koga, Kazunari Kurita |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
chemistry.chemical_element Nanotechnology Surfaces and Interfaces Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ion implantation CMOS chemistry Getter Materials Chemistry Cluster (physics) Electrical and Electronic Engineering Image sensor Carbon |
| Zdroj: | physica status solidi (a). 214:1770141 |
| ISSN: | 1862-6319 1862-6300 |
| DOI: | 10.1002/pssa.201770141 |
| Databáze: | OpenAIRE |
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