| Autor: |
Robert Thalhammer, Doris Schmitt-Landsiedel, Werner Weber, Jyrki Kaitila, Mohamed Abd Allah |
| Rok vydání: |
2009 |
| Předmět: |
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| Zdroj: |
2009 IEEE International Ultrasonics Symposium. |
| Popis: |
Temperature compensation is becoming more and more a high demand for RF filters in order to successfully meet the tightening specifications over a wide range of temperatures. We show our results on temperature compensation by adding thin SiO 2 layers at high stress regions inside the resonator. We examine the effect of adding the SiO 2 layer on the resonators properties and we extract an accurate value to the temperature coefficient of stiffness of thin film SiO 2 . |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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