SNR enhancement of a spin-MEMS microphone by optimum bias magnetic field and demonstration of operation sound monitoring of rotating equipment

Autor: Tomohiko Nagata, Shotaro Baba, Michiko Hara, Akiko Yuzawa, Yoshihiko Fuji, Kenji Otsu, Tomio Ono, Shiori Kaji, Yoshihiro Higashi, Kei Masunishi, Keiko Okamoto
Rok vydání: 2018
Předmět:
Zdroj: 2018 IEEE Micro Electro Mechanical Systems (MEMS).
DOI: 10.1109/memsys.2018.8346742
Popis: We report on a wide-bandwidth Spin-MEMS microphone, in which spintronic strain-gauge sensors (Spin-SGSs) based on magnetic tunnel junctions are integrated on a diaphragm, with a mechanical resonance frequency of over 70 kHz and a signal-to-noise ratio (SNR) of 49 dB A. SNR enhancement is realized by adopting an optimum bias magnetic field. We compare operation sounds of defective and normal bearings using the packaged microphone. The Spin-MEMS microphone detects differences in the operation sounds between the defective and normal bearings at the high-frequency range of 10 kHz to 50 kHz, which is a promising result for fault prediction of rotating equipment.
Databáze: OpenAIRE