Releasing SU-8 structures using polystyrene as a sacrificial material
| Autor: | Thomas D. Schneider, Robert C. White, John Garra, Cheng Luo, Amitha Govindaraju, John F. Currie, Makarand Paranjape |
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| Rok vydání: | 2004 |
| Předmět: |
Spin coating
Materials science Metals and Alloys Condensed Matter Physics Toluene Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound Membrane chemistry Chemical engineering Polymer chemistry Deposition (phase transition) Polystyrene Electrical and Electronic Engineering Instrumentation Dissolution Layer (electronics) |
| Zdroj: | Sensors and Actuators A: Physical. 114:123-128 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2004.02.042 |
| Popis: | We have successfully developed a new method to release SU-8 structures with polystyrene as a sacrificial material. Toluene is initially used to dissolve solid polystyrene, and the resulting solution is employed to spin coat a sacrificial polystyrene layer onto a glass plate prior to SU-8 deposition. Toluene is used again at the end of the process to sacrificially etch the polystyrene layer to release the cured SU-8 structures. Toluene has no effect on the cured SU-8, even with significant over-etch times, and the dissolution and etch rates are relatively fast. Using this method, we have successfully released SU-8 membranes of an area of 50 cm 2 . |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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