NANOPOROUS ALUMINA MEMBRANE STRUCTURES FOR RELATIVE HUMIDITY SENSING ELEMENTS

Autor: D. L. Shimanovich, D. I. Chushkova
Rok vydání: 2013
Předmět:
Zdroj: Physics, Chemistry and Applications of Nanostructures.
Popis: The volumetric-surface variant of the capacitive MDM (metal-dielectric-metal) structure of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements was designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to alumina membranes with open-ended and widened pores without the barrier layer. It allows to eliminate the effect of the electrolyte anions embedded in pore walls on the adsorption/desorption processes.
Databáze: OpenAIRE