A Mems Electro-Mechanical Co-Optimization Platform Featuring Freeform Geometry Optimization Based on a Genetic Algorithm
| Autor: | Chen Wang, Aojie Quan, Weidong Fang, Haoyu Huang, Linlin Wang, Michiel Gidts, Yangyang Guan, Huafeng Liu, Hemin Zhang, Jian Bai, Yuan Wang, Michael Kraft |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). |
| DOI: | 10.1109/mems51670.2022.9699829 |
| Databáze: | OpenAIRE |
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