Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis
| Autor: | Shuo Zhao, Lei Sun, Itty Matthew, Vince Plachecki, Francis Goodwin, Zhengqing John Qi, Yulu Chen |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
business.industry Computational lithography Process Chemistry and Technology Extreme ultraviolet lithography 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials Design for manufacturability 010309 optics Optics Nanolithography 0103 physical sciences Materials Chemistry Optoelectronics X-ray lithography Electrical and Electronic Engineering 0210 nano-technology business Instrumentation Throughput (business) Lithography Next-generation lithography |
| Zdroj: | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 35:06G601 |
| ISSN: | 2166-2754 2166-2746 |
| Popis: | The authors develop and present computational lithography solutions to mitigate the tip-to-tip variations in 7 nm and beyond metallization layers. An array of patterns that represent lithography challenges are generated from basic design rules. The lithography process is optimized by source mask co-optimization to achieve high image qualities and maximum overlapping process windows for all patterns. By analyzing the role of diffraction orders in forming images with tight tip-to-tip, the authors identify the diffraction orders that should be admitted or rejected in the projection imaging system. This leads to analytically derived source profiles that match and explain numerical results. The authors have also found optimal minimum pitches that can achieve robust lithography process as well as design flexibility without losing throughput. Our work provides design for manufacturability guidance to metallization layers in advanced technology nodes so that patterning failures can be avoided before time-consumin... |
| Databáze: | OpenAIRE |
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