Investigation of stochastic roughness effects for nanoscale grating characterization with a stand-alone EUV spectrometer
| Autor: | Sven Glabisch, Sophia Schröder, Sascha Brose, Henning Heiming, Jochen Stollenwerk, Carlo Holly |
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| Rok vydání: | 2022 |
| Zdroj: | Photomask Technology 2022. |
| DOI: | 10.1117/12.2641625 |
| Databáze: | OpenAIRE |
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