Characteristics of Critical Pressure for a Beam Shape of the Anode Type Ion Beam Source
Autor: | Jeha Kim, Yunseok Hwang, Yunsung Huh |
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Rok vydání: | 2018 |
Předmět: |
010302 applied physics
Materials science Ion beam business.industry Materials Science (miscellaneous) 02 engineering and technology General Medicine 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Anode Optics 0103 physical sciences Beam shape Electrical and Electronic Engineering Physical and Theoretical Chemistry 0210 nano-technology business |
Zdroj: | Applied Science and Convergence Technology. 27:65-69 |
ISSN: | 2288-6559 |
DOI: | 10.5757/asct.2018.27.4.65 |
Databáze: | OpenAIRE |
Externí odkaz: |