Multiple methods of modeling MEMS

Autor: G. Groot Gregory, Brien J. Housand, Leo R. Gardner
Rok vydání: 2005
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.603814
Popis: Micro-Electro-Mechanical Systems or MEMS are becoming increasingly important in several optical applications. In particular, devices composed of an array of active micro-optics can be used for wavefront correction, optical switching, and generic digital light control. Whatever the application, it is important for anyone seeking to employ this technology to use computer modeling to predict the performance of the subsystem that incorporates optical MEMS. In this paper we will show how commercially available software can be used to model these systems using several approaches.
Databáze: OpenAIRE