Resonant Piezoelectric Varifocal Mirror with on-Chip Integrated Diffractive Optics for Increased Frequency Response
| Autor: | Jaka Pribošek, Anton Lagosh, Pooja Thakkar, Takashi Sasaki, Markus Bainschab |
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| Rok vydání: | 2023 |
| Zdroj: | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/mems49605.2023.10052247 |
| Databáze: | OpenAIRE |
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