A Micro-Hotplate for MEMS Based Gas Sensor
| Autor: | Wei He, Changhui Zhao, Gaoqiang Niu, Zhitao Yang, Lingxiang He, Fei Wang, Hiuming Gong |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science Microscope Infrared business.industry chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Finite element method law.invention chemistry law 0103 physical sciences Electrode Thermography Optoelectronics 0210 nano-technology business Platinum Voltage |
| Zdroj: | 2018 19th International Conference on Electronic Packaging Technology (ICEPT). |
| DOI: | 10.1109/icept.2018.8480572 |
| Popis: | This work designed a micro-hotplate for micro-electromechanical systems (MEMS) based gas sensor, in which the heating electrode and the test electrode are placed on the same plane. The micro-hotplate with four pins was optimized the finite element analysis method. The heating electrode and test electrode were made of platinum. The working temperature of heating electrode was controlled by the voltage of heating electrode and calibrated through the linear resistance-temperature characteristic curve and relation curve of voltage and resistance. Infrared thermography microscope directly observed the temperature distribution of the heating electrode at different voltages. The micro-hotplate was used for ethanol detecting based on SnO 2 nanosheets and the response reached at 21.4 in 100 ppm ethanol gas. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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