Role of Combustion Chemistry in Low-Temperature Deposition of Metal Oxide Thin Films from Solution
| Autor: | Darren W. Johnson, Shannon W. Boettcher, Douglas A. Keszler, Deok-Hie Park, Cory K. Perkins, Ryan H. Mansergh, Elizabeth A. Cochran, Matthew G. Kast, Lisa J. Enman |
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| Rok vydání: | 2017 |
| Předmět: |
Fabrication
Materials science General Chemical Engineering Acetylacetone Inorganic chemistry 02 engineering and technology General Chemistry Combustion chemical vapor deposition 010402 general chemistry 021001 nanoscience & nanotechnology Combustion 01 natural sciences 0104 chemical sciences chemistry.chemical_compound Carbon film Vacuum deposition chemistry Materials Chemistry Deposition (phase transition) Thin film 0210 nano-technology |
| Zdroj: | Chemistry of Materials. 29:9480-9488 |
| ISSN: | 1520-5002 0897-4756 |
| DOI: | 10.1021/acs.chemmater.7b03618 |
| Popis: | Metal-oxide thin films find many uses in (opto)electronic and renewable energy technologies. Their deposition by solution methods aims to reduce manufacturing costs relative to vacuum deposition while achieving comparable electronic properties. Solution deposition on temperature-sensitive substrates (e.g., plastics), however, remains difficult due to the need to produce dense films with minimal thermal input. Here, we investigate combustion thin-film deposition, which has been proposed to produce high-quality metal-oxide films with little externally applied heat, thereby enabling low-temperature fabrication. We compare chemical composition, chemical structure, and evolved species from reactions of several metal nitrate [In(NO3)3, Y(NO3)3, and Mg(NO3)2] and fuel additive (acetylacetone and glycine) mixtures in bulk and thin-film forms. We observe combustion in bulk materials but not in films. It appears acetylacetone is removed from the films before the nitrates, whereas glycine persists in the film beyond... |
| Databáze: | OpenAIRE |
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