The microtron in X-ray lithography
| Autor: | C. Mileikowsky |
|---|---|
| Rok vydání: | 1987 |
| Předmět: |
Physics
Superconductivity Nuclear and High Energy Physics business.industry Synchrotron light source Injector Synchrotron law.invention law Condensed Matter::Superconductivity Physics::Accelerator Physics Optoelectronics X-ray lithography business Instrumentation Lithography Microtron Computer Science::Databases Storage ring |
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :820-825 |
| ISSN: | 0168-583X |
| DOI: | 10.1016/s0168-583x(87)80256-2 |
| Popis: | The race-track microtron can play two important roles in X-ray lithography: It can serve as a low energy injector (at 50–150 MeV) to compact synchrotron/storage rings which are either normal conducting or superconducting; or it can, in a superconducting version, serve as full energy injector (at e.g. 680 MeV) integrated with a surrounding superconducting storage ring, forming a compact synchrotron light source. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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