PECVD of carbon by inverted fireballs: From sputtering, bias enhanced nucleation to deposition
| Autor: | Jakob Reynvaan, K. Ettinger, Peter Knoll, S. Surnev, Kurt Krenn, A. Hohenau, J. Gruenwald, C. Prietl, Roland Resel, Birgit Kunert, P. Geistlinger, M. Mayer |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
Analytical chemistry Nucleation chemistry.chemical_element engineering.material 01 natural sciences 010305 fluids & plasmas symbols.namesake Sputtering Plasma-enhanced chemical vapor deposition 0103 physical sciences Materials Chemistry Deposition (phase transition) Electrical and Electronic Engineering 010302 applied physics business.industry Mechanical Engineering Diamond General Chemistry Electronic Optical and Magnetic Materials Carbon film chemistry symbols engineering Optoelectronics Raman spectroscopy business Carbon |
| Zdroj: | Diamond and Related Materials. 65:96-104 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/j.diamond.2016.02.021 |
| Popis: | The novel method of so called “inverted fireballs” is employed to different surface processes important in carbon deposition. This new approach of PECVD offers the possibility to influence and vary the reactive plasma in a wide range. Details of the experimental setup required for a stable inverted fireball are presented and the advantages and limits of this novel method are discussed. Sputtering of carbon films, nucleation of carbon with negative biased substrate and growth of nano-diamonds are outlined together with characterizations by means of SEM, EDX, Raman, XRD and XPS. Also an ab-initio calculation of the Raman spectrum of a small diamond cluster is presented and discussed in comparison with obtained experimental results. |
| Databáze: | OpenAIRE |
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