Influence of Nitrogen Seeding on the Electron and Ion Behaviors in Helicon Wave Excited Argon Plasma

Autor:	Maoyang Li, Tianyuan Huang, Peiyu Ji, Haiyun Tan, Lanjian Zhuge, Xuemei Wu
Rok vydání:	2023
Předmět:	General Chemical Engineering General Chemistry Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	Plasma Chemistry and Plasma Processing. 43:547-560
ISSN:	1572-8986 0272-4324
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::008d1fa6002b17828904feacd61fdd03 https://doi.org/10.1007/s11090-023-10311-4 Zobrazit plný text záznamu Full text from SpringerLink