Autor:	Junichi Onodera, Atsuko Yamaguchi, Hiroaki Oizumi, Daiju Shiono, Hideo Hada, Taku Hirayama, Yuusuke Tanaka, Iwao Nishiyama
Rok vydání:	2006
Předmět:	Materials science Polymers and Plastics Resist business.industry Extreme ultraviolet lithography Organic Chemistry Materials Chemistry Optoelectronics Nanotechnology business
Zdroj:	Journal of Photopolymer Science and Technology. 19:507-514
ISSN:	1349-6336 0914-9244
DOI:	10.2494/photopolymer.19.507
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0054254dea43b8ed602f1c5d61618dcf https://doi.org/10.2494/photopolymer.19.507 Zobrazit plný text záznamu