An optical fiber Fabry–Perot pressure sensor using corrugated diaphragm and angle polished fiber
Autor: | Ming Wang, Lu Chen, Xiaoqi Ni, Jiali Zhu, Haibin Ni |
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Rok vydání: | 2017 |
Předmět: |
Optical fiber
Materials science business.industry Polarization-maintaining optical fiber Diaphragm (mechanical device) 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Graded-index fiber Pressure sensor Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention 010309 optics Optics Control and Systems Engineering Fiber optic sensor law 0103 physical sciences Dispersion-shifted fiber Fiber Electrical and Electronic Engineering 0210 nano-technology business Instrumentation |
Zdroj: | Optical Fiber Technology. 34:42-46 |
ISSN: | 1068-5200 |
DOI: | 10.1016/j.yofte.2016.12.004 |
Popis: | In this paper, a Fabry-Perot pressure sensor using a corrugated diaphragm and angle polished fiber is proposed. A SU-8 structure using two step of lithography is formed to fix the polished fiber, which helps control the cavity length precisely. The fabrication process is described. The characteristics of both pressure and temperature are tested. Also the temperature compensation is realized. Experimental results show that the sensor has high sensitivity and good linearity over the pressure range of 0–0.1 MPa. The sensitivity (change in cavity/loaded pressure) is 705.64 μm/MPa. |
Databáze: | OpenAIRE |
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