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The OnTool™ Booster vacuum pump consists of side channel and Holweck pump stages. This pump achieves 10−3 Pa final pressure and exhausts against atmosphere. Research is done on side channel pump stages. It shows the ways to increase the compression and pumping speed while simultaneously reducing size and power consumption. The influences of a backing pump on the power consumption, the form and number of rotor blades on the performance of side channel pump stages have been investigated. It was shown that the power consumption of the pump at final pressure drops from 1150 W to less than 150 W, if a backing pump is used. The properties of double-flow and single-flow side channel stages were compared to each other. It was shown that double-flow stages have a higher pumping speed and a lower compression than single-flow stages. As a result of the investigation the compression and pumping speed of side channel pump stages are increased significantly at reduced power consumption. |
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