Simplifying the Design,Analysis, and Layout of a N/MEMS Nanoscale Material Testing Device
| Autor: | Richa BANSAL, Jason V. CLARK |
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| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: | |
| Zdroj: | Sensors & Transducers, Vol 13, Iss Special Issue, Pp 87-97 (2011) |
| ISSN: | 1726-5479 2306-8515 |
| Popis: | We present the details of our online tool that greatly simplifies the design, analysis, and layout processes for Micro Electro Mechanical Systems (MEMS). Our test case is a M/NEMS nanomaterial-testing device comprised of an electro-thermal actuator, an electrostatic comb drive sensor and a carbon nanotube specimen. The performance of the actuator depends on its design configuration and the mechanical properties of the specimen. Our tool allows users to easily explore its performance within a parameterized design space, optimize the tester for a chosen specimen type, and export corresponding layout arrays in GDS-II format for direct manufacture. We also integrate our parameterized lumped model of a carbon nanotube (CNT) with the MEMS tester for a complete multi-scale representation of a micro/nanosystem. Our results show that our model agrees well with previously reported results and that such an M/NEMS can be explored and laid-out by novices in minutes. Users may create and explore modifications of this device through SugarCube at www.nanoHub.org |
| Databáze: | OpenAIRE |
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