The Research on the Characteristics of Micro-fabrication Platform Control System

Autor:	Xuepeng Liu, Dongsheng Zhang, Xiaohong Hao
Jazyk:	angličtina
Rok vydání:	2014
Předmět:	Reverse step blunt Servo match lcsh:Technology (General) lcsh:T1-995 Reverse clearance Round error Repositioning accuracy
Zdroj:	Sensors & Transducers, Vol 173, Iss 6, Pp 210-214 (2014)
ISSN:	1726-5479 2306-8515
Popis:	X-Y two-axis micro-fabrication platform was controlled by double CPU. The interpolation algorithm and system model were discussed. The repositioning accuracy reached 6.21 mm with moving rate of 2000.00 mm/min. The rate decreased to 1000 mm/min, the contour error is 53.3 mm. The position error and contour error existed due to reverse clearance, reverse step blunt, and servo mismatch. The round error is greater with the increase of moving rate.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doajarticles::b8d14fbc1ed00d66edcc6395524eec56 http://www.sensorsportal.com/HTML/DIGEST/june_2014/Vol_173/P_RP_0147.pdf Zobrazit plný text záznamu