New Type Small-angle Sensor Based on the TIR and SPR Theories in Heterodyne Interferomery

Autor: Shinn-Fwu Wang, Jyh-Shyan Chiu, Lung-Hsiang Lee, Cheng-Min Lee, Rong-Moo Hong
Jazyk: angličtina
Rok vydání: 2009
Předmět:
Zdroj: Sensors & Transducers, Vol 105, Iss 6, Pp 18-25 (2009)
ISSN: 1726-5479
2306-8515
Popis: In this paper, a new type small-angle sensor based on the total internal reflection (TIR) and surface plasmon resonance (SPR) theories in heterodyne interferomery is proposed. With the small-displacement sensor, a small rotation angle can be obtained only by measuring the variation in phase difference between s- and p-polarization states. The best theoretical sensitivity of the small-angle sensor is 2x10-4 degree/degree. And its resolution can reach 1x10-7 radian. The sensor has some merits, e.g., a simple optical setup, high resolution, high sensitivity, rapid measurement.
Databáze: OpenAIRE