Impact base excitation method with stacked PZT actuator for MEMS dynamic characterization
| Autor: | Dongsheng She, Yiliu Yang, Zefei Wei, Zhen Yu |
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| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | Journal of Measurements in Engineering, Vol 4, Iss 1, Pp 7-14 (2016) |
| ISSN: | 2424-4635 2335-2124 |
| Popis: | An impact base excitation method with stacked PZT actuator for MEMS dynamic characterization was studied. A typical impact base excitation device mainly includes a stacked PZT actuator, a base structure and an impulse power source. The principle of this method is as follows. The tested microstructure was attached on the top surface of PZT through the base structure in between. Applying a transient impulse voltage on PZT, an impact will be generated in the vertical direction of PZT. The impact will strike the base structure to vibrate. The tested microstructure can be excited by the movement of the base structure. Basing on the principle of this method, a dynamic measurement system for piezoresistive microcantilevers was established. A laser deflection system was developed to measure the frequency bandwidth of excitation device. The experiments on the frequency bandwidth of excitation device and the dynamic characteristics of a T-shaped piezoresistive microcantilever were carried out. The results show that this method is effective for MEMS dynamic characteristics measurement. |
| Databáze: | OpenAIRE |
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