Effect of Oxygen Addition in the Sputtering Gas on the Dielectric Properties of a-BaTiO3 Films
| Autor: | Jomni, Fathi, Gonon, Patrice, El Kamel, Fadhel, Yangui, Béchir |
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| Přispěvatelé: | Université de Tunis El Manar (UTM), Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Génie Electrique de Grenoble (G2ELab), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut Polytechnique de Grenoble - Grenoble Institute of Technology-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Garcia, Sylvie |
| Jazyk: | angličtina |
| Rok vydání: | 2008 |
| Předmět: | |
| Zdroj: | Integrated Ferroelectrics Integrated Ferroelectrics, Taylor & Francis, 2008, 97, pp 121 Integrated Ferroelectrics, 2008, 97, pp 121 |
| ISSN: | 1058-4587 |
| Popis: | International audience; Amorphous barium titanate films (a-BTO) were grown by the RF magnetron sputtering technique at low temperature and under various oxygen/argon mixing ratios (OMR). Their dielectric properties (dielectric constant, loss and ac conductivity in the 0.1-105 Hz range), dc leakage currents, and thermally stimulated currents were systematically studied as a function of OMR in the sputtering gas (0 to 20 %). We demonstrate that the presence of oxygen plays a significant role in improving the dielectric properties of a-BTO thin films. The oxygen incorporation successfully suppressed some electrical defects. The bulk conductivity and leakage currents are reduced although a small decrease of dielectric constant has been observed. Films prepared at higher oxygen ratio (20%) have a small leakage current density (3.6 × 10−7 A/m2) and lower tangent loss (2 × 10−3). |
| Databáze: | OpenAIRE |
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