Exploring Boltzmann-Factor Distributions of Precipitation-Nuclei in the TEM
| Autor: | Daugherty, Jamie, Fraundorf, P, Osborn, David, Kasthuri, Jai |
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| Přispěvatelé: | University of Missouri [St. Louis], University of Missouri System, Washington University in Saint Louis (WUSTL), SunEdison, Inc. |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
nano-characterization
nucleation centres transmission electron microscopy [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [PHYS.COND.CM-SM]Physics [physics]/Condensed Matter [cond-mat]/Statistical Mechanics [cond-mat.stat-mech] [SPI.TRON]Engineering Sciences [physics]/Electronics |
| Zdroj: | Microscopy and Microanalysis 2016 meeting Microscopy and Microanalysis 2016 meeting, Jul 2016, Columbus, Ohio, United States. pp.942-943 |
| Popis: | International audience; For nucleation in the solid-state, modern electron microscopes may allow one to examine pre-critical cluster distributions down to the size-scale of a single misplaced atom. A very specific challenge of this sort arises in the gigascale silicon integrated-circuit device industry, surrounding the important roles that oxygen in Czochralski silicon can play. We indicate here in particular that the number densities and sizes of precritical SiOx clusters in as-grown wafers, as estimated by elementary means, should be possible to quantify with modern techniques, provided that challenges associated with surface noise and thickness estimation can be overcome. |
| Databáze: | OpenAIRE |
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